Thin film processes / edited by John L. Vossen, Werner Kern.
Thin film processes
Saved in:
| Personal Name(s): | Vossen, John L. |
|---|---|
| Kern, Werner. | |
| Imprint: |
New York :
Academic Press,
1978.
|
| Physical Description: |
xi, 564 p. |
| Note: |
englisch |
| ISBN: |
9780127282503 0127282505 |
| Keywords: |
epitaxy : methodology review : sputtering : chemical vapor deposition : etching |
| Classification: | |
| Shelf Classification: |
Call Number: B 047305'01' Barcode: 1083002977
