Scanning Electron Microscopy [E-Book] : Physics of Image Formation and Microanalysis / by Ludwig Reimer.
Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interations. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling...
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Full text |
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Personal Name(s): | Reimer, Ludwig, author |
Edition: |
Second Completely Revised and Updated Edition. |
Imprint: |
Berlin, Heidelberg :
Springer,
1998
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Physical Description: |
XIV, 529 p. online resource. |
Note: |
englisch |
ISBN: |
9783540389675 |
DOI: |
10.1007/978-3-540-38967-5 |
Series Title: |
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Springer Series in Optical Sciences ;
45 |
Subject (LOC): |
- Electron Optics of a Scanning Electron Microscope
- Electron Scattering and Diffusion
- Emission of Backscattered and Secondary Electrons
- Electron Detectors and Spectrometers
- Image Contrast and Signal Processing
- Electron-Beam-Induced Current and Cathodoluminescence
- Special Techniques in SEM
- Crystal Structure Analysis by Diffraction
- Elemental Analysis and Imaging with X-Rays.