This title appears in the Scientific Report :
2008
The disposable Dot Field Effect Transistor: Process flow and overlay requirements
The disposable Dot Field Effect Transistor: Process flow and overlay requirements
| Personal Name(s): | Moers, J. |
|---|---|
| Gerharz, J. / Trellenkamp, S. / von der Hart, A. / Grützmacher, D. | |
| Contributing Institute: |
Halbleiter-Nanoelektronik; IBN-1 Prozesstechnologie; IBN-PT Center of Nanoelectronic Systems for Information Technology; CNI |
| Published in: |
ASDAM 2008 |
| Imprint: |
2008
|
| Conference: | Smolenice, Slovakia 2008-10-12 |
| Document Type: |
Conference Presentation |
| Research Program: |
Grundlagen für zukünftige Informationstechnologien |
| Publikationsportal JuSER |
| Description not available. |