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Industrial plasma technology : applications from environmental to energy technologies /
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Großflächige Plasmaabscheidung von mikrokristallinem Silizium für mikromorphe Dünnschichtsolarmodule /
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Principles of plasma discharges and materials processing /
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Handbook of plasma immersion ion implantation and deposition /
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Subject (ZB): “...film deposition...”
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Wachstumsmechanismen bei der plasmagestuetzten Abscheidung von Kohlenwasserstoffschichten, eine in situ Ellipsometriestudie.
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Vakuumbeschichtung Vol 0001: Plasmaphysik, Plasmadiagnostik, Analytik.
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Frey, H.
1995
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Plasma sources for thin film deposition and etching.
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Subject (ZB): “...thin film physics...”
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