1
Polymers for microelectronics: science and technology : International Symposium on Polymers for Microelectronics - science and technology: proceedings : PME : 1989: proceedings : Tokyo, 29.10.89-02.11.89.
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Tabata, Y.
1990
“...FGME - Microlithography...”
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2
Polymerwerkstoffe für die Elektronik. 2 : Symposium : Würzburg, 16.10.90-17.10.90.
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“...FGME - Microlithography...”
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Microcircuit engineering. 1989 : Microcircuit engineering: international conference. 15 : International conference on microlithography : ME. 1989 : Cambridge, 26.09.89-28.09.89 /
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“...FGME - Microlithography...”
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4
Polymers in microlithography: materials and processes : Polymers in microlithography: materials and processes: symposium : National meeting of the American Chemical Society. 0197 : Dallas, TX, 09.04.89-14.04.89.
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“...FGME - Microlithography...”
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Advances in resist technology and processing. 0005: conference : Santa-Clara, CA, 29.02.88-02.03.88.
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“...FGME - Microlithography...”
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Polymers for high technology: electronics and photonics : Polymers for high technology: symposium : Meeting of the American Chemical Society. 0192 : Anaheim, CA, 07.09.86-12.09.86.
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“...FGME - Microlithography...”
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Advances in resist technology and processing : 0004: proceedings : Santa-Clara, CA, 02.03.87-03.03.87.
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“...FGME - Microlithography...”
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8
Polymer materials for electronic applications : Chemical congress of the north american continent 2 : ACS national meeting 180 : Las-Vegas, NV, 26.08.80-27.08.80.
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“...FGME - Microlithography...”
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