1
Herstellung von Hochtemperatur-Brennstoffzellen über physikalische Gasphasenabscheidung /
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Seltenerd-basierte ternäre Oxide als alternative Gatedielektrika /
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Subject (ZB): “...sputter deposition...”
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3
Reactive sputter deposition /
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4
Untersuchung des reaktiven Sputterprozesses zur Herstellung von aluminiumdotierten Zinkoxid-Schichten für Silizium-Dünnschichtsolarzellen /
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Subject (ZB): “...sputter deposition...”
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5
Magnetron-gesputterte superharte, amorphe Kohlenstoffschichten mit gradiertem Schichtaufbau /
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Subject (ZB): “...sputter deposition...”
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6
Modeling of film deposition for microelectronic applications.
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7
Reaktives Sputtern von Oxidfilmen: Herstellung dielektrischer dünner Schichten für technische Anwendungen /
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Subject (ZB): “...sputter deposition...”
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8
Handbook of sputter deposition technology : principles, technology, and applications /
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Subject (ZB): “...sputter deposition...”
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9
Gesputterte funktionelle Beschichtungen auf Kunststoffolie: transparent leitfähige Beschichtungen mit niedriger Emissivität.
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Subject (ZB): “...sputter deposition...”
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10
Kalte Plasmen : Grundlagen, Erscheinungen, Anwendungen /
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Subject (ZB): “...sputter deposition...”
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11
Wear and corrosion resistant coatings by CVD and PVD /
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Subject (ZB): “...sputter deposition...”
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12
Advances in thin film technology : Sputtering and etching : Materials Research Corporation : sputtering schools. 34 and 35 : Roma, Santa-Barbara, CA, 06.84 ; 11.84.
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Weinig, S.
1984
Subject (ZB): “...sputter deposition...”
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13
Ion assisted surface treatments, techniques and processes : Proceedings of the conference : Coventry, 14.09.1982-16.09.1982.
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1982
Subject (ZB): “...sputter deposition...”
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