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1
Book
Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology /
Madou, Marc J.
2012
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FGT
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Microtechnology
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2
Book
Manufacturing techniques for microfabrication and nanotechnology /
Madou, Marc J.
2012
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FGT
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Microtechnology
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3
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From MEMS to Bio-MEMS and Bio-NEMS : manufacturing techniques and applications /
Madou, Marc J.
2012
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FGT
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Microtechnology
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4
Book
Nano/microscale heat transfer /
Zhang, Zhuomin M.
2007
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FGT
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Microtechnology
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4
Material Type
Book
4
Type of Literature
Handbook, Textbook
Year of Publication
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ZB
4
Name
Madou, Marc J.
3
Zhang, Zhuomin M.
1
Subject
nanotechnology
3
chemical vapor deposition
1
crystallography
1
etching
1
heat transfer
1
lithography
1
more ...
mass transfer
1
microelectromechanical systems (MEMS)
1
microfabrication (for microelectronics only)
1
microtechnology
1
nanoelectronics
1
nanostructured material
1
photonics
1
quantum mechanics
1
scaling theory
1
solid state physics
1
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Classification
FGN - Nanotechnology
4
FGT - Microtechnology
4
THM - Heat transfer, mass transfer - technical aspects
1
Language
English
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