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1
Book
Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology /
Madou, Marc J.
2012
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FGT
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Microtechnology
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2
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From MEMS to Bio-MEMS and Bio-NEMS : manufacturing techniques and applications /
Madou, Marc J.
2012
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Microtechnology
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3
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Manufacturing techniques for microfabrication and nanotechnology /
Madou, Marc J.
2012
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FGT
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Microtechnology
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ZB
3
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Madou, Marc J.
3
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nanotechnology
chemical vapor deposition
1
crystallography
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etching
1
lithography
1
microelectromechanical systems (MEMS)
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microfabrication (for microelectronics only)
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microtechnology
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nanoelectronics
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photonics
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quantum mechanics
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scaling theory
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solid state physics
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FGN - Nanotechnology
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FGT - Microtechnology
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