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VLSI technology
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microelectronics
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1
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Semiconductor integrated circuit processing technology /
Runyan, W. R.
1990
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2
Book
Microelectronics processing: chemical engineering aspects /
Hess, D. W.
1989
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3
Book
VLSI technology /
Sze, S. M.
1988
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FGM
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Microelectronic
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3
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1
Name
Bean, Kenneth E.
1
Hess, D. W.
1
Runyan, W. R.
1
Sze, S. M.
1
Subject
VLSI technology
microelectronics
chemical vapor deposition
1
electronic packaging
1
film deposition
1
liquid phase epitaxy
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materials processing
1
microfabrication (for microelectronics only)
1
microlithography
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photoresist
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plasma etching
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vapor phase epitaxy
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FGM - Microelectronic technology
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English
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