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microfabrication (for microelectronics only)
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1
Book
Manufacturing techniques for microfabrication and nanotechnology /
Madou, Marc J.
2012
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2
Book
MST Atlas Deutschland 2005 : Mikrosystemtechnik - Cluster in Deutschland /
Kleinkes, Uwe.
2005
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3
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Micro materials : 3rd international conference and poster exhibition : proceedings : MicroMat 2000, April 17 - 19, 2000, Berlin, Germany /
Michel, B.
2000
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4
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Microsystem technology in chemistry and life science /
Anderson, Rolfe C.
1998
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5
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Micro system technologies 1994 : International conference on micro electro, opto, mechanical systems and components 0004 : Micro system technologies: international conference 0004...
Reichl, H.
1994
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6
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Werkstoffe der Mikrotechnik : Basis für neue Produkte : Werkstoffe der Mikrotechnik : Basis für neue Produkte: Tagung : Berlin, 12.10.89-13.10.89
1989
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ZB
5
IBN-1-2
1
Name
Anderson, Rolfe C.
1
Becker, Holger
1
Cheng, J.
1
Effenhauser, C. S.
1
Ehrfeld, W.
1
Kleinkes, Uwe.
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Madou, Marc J.
1
Manz, Andreas
1
Michel, B.
1
Reichl, H.
1
Van den Berg, A.
1
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Subject
microfabrication (for microelectronics only)
microtechnology
5
sensor (technical and physical)
2
actuator
1
chemical vapor deposition
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etching
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genetic code
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interface
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lithography
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microanalysis
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microelectronics
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microstructure
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nanotechnology
1
neuron
1
sensor (biological)
1
sensor (chemical)
1
sequence analysis
1
shape memory effect
1
thin film technology
1
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Classification
FGT - Microtechnology
6
FGM - Microelectronic technology
1
FGN - Nanotechnology
1
FHCH - Microstructural analysis
1
TBD - Microelectronics
1
Language
English
2
German
1
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