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1
Book
Silicides : fundamentals and applications : proceedings of the 16th course of the international school of solid state physics, Erice, Italy 5 - 6. June 1999 /
Miglio, Leo
2000
“
...
FGMH
-
Metallization
,
physics
of
microelectronics
...
”
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2
Book
Chemical vapor deposition of tungsten and tungsten silicides for VLSI/ULSI applications /
Schmitz, John E. J.
1992
“
...
FGMH
-
Metallization
,
physics
of
microelectronics
...
”
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3
Book
Silizide der Ãœbergangsmetalle als Diffusionsquellen zur Erzeugung flacher Dotierungsgebiete in der VLSI-Technologie.
Probst, V.
1991
“
...
FGMH
-
Metallization
,
physics
of
microelectronics
...
”
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Available as
Print Edition
Material Type
Book
3
Type of Literature
Handbook, Textbook
1
Theses
1
Conference Publication
1
Year of Publication
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Location
ZB
3
Name
Miglio, Leo
1
Probst, V.
1
Schmitz, John E. J.
1
Subject
silicide
VLSI technology
2
chemical vapor deposition
1
metallization
1
tungsten
1
Classification
FGMH - Metallization, physics of microelectronics
3
FGKF - Chemical vapor deposition
1
FJKD - Compound semiconductors
1
FNPD - Hard materials, refractory compounds
1
Language
English
1
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