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silicide
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VLSI technology
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1
Book
Chemical vapor deposition of tungsten and tungsten silicides for VLSI/ULSI applications /
Schmitz, John E. J.
1992
“
...
FGMH
-
Metallization
,
physics
of
microelectronics
...
”
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2
Book
Silizide der Ãœbergangsmetalle als Diffusionsquellen zur Erzeugung flacher Dotierungsgebiete in der VLSI-Technologie.
Probst, V.
1991
“
...
FGMH
-
Metallization
,
physics
of
microelectronics
...
”
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Probst, V.
1
Schmitz, John E. J.
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VLSI technology
silicide
chemical vapor deposition
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metallization
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tungsten
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FGMH - Metallization, physics of microelectronics
2
FGKF - Chemical vapor deposition
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