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vacuum deposition
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1
Book
Vakuumbeschichtung Vol 0002: Verfahren und Anlagen.
Kienel, G.
1995
“
...
FGKJ
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Plasma
processing
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etching
...
”
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2
Book
Vakuumbeschichtung Vol 0001: Plasmaphysik, Plasmadiagnostik, Analytik.
Frey, H.
1995
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FGKJ
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Plasma
processing
,
etching
...
”
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ZB
2
Name
Frey, H.
1
Kienel, G.
1
Subject
vacuum deposition
etching
1
evaporation
1
ion beam technology
1
ion implantation
1
ion plating
1
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plasma diagnostics
1
plasma physics
1
sputtering
1
surface analysis
1
thin film technology
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Classification
FGKC - Vacuum deposition, MBE
2
FGKJ - Plasma processing, etching
2
FGKF - Chemical vapor deposition
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