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Charakterisierung und Optimierung selektiv gewachsener vertikaler Silizium-MOS-Feldeffekttransistoren [E-Book] /
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Modern semiconductor device physics /
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Sze, S. M.
1998
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Mikroelektronik. 1. Prinzipien, Bauelemente und Werkstoffe der Siliziumtechnologie /
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Gate dielectrics and MOS ULSls : principles, technologies and applications /
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Silicon processing for the VLSI era. 3. The submicron MOSFET.
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MOS Technologie /
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