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Metal based thin films for electronics /
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Handbook of thin film devices. 5. Ferroelectric film devices /
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Handbook of thin film devices. 1. Hetero-structures for high performance devices /
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Low and high dielectric constant materials. Thin film materials for advanced packaging technologies : materials science, processing and reliability issues : proceedings of the Fourth International Symposium [on Low and High Dielectric Constant Materials] : proceedings of the Second International Symposium [on Thin Film Materials for Advanced Packaging] /
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Singh, R.
1999
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Multicomponent oxide films for electronics : symposium held April 6-8, 1999, San Francisco, California, U.S.A. /
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Ultrathin SiO2 and high-K materials for ULSI gate dielectrics : symposium held April 5 - 8, 1999, San Francisco, California, USA [at the 1999 MRS spring meeting] /
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Oberflächeninduzierte Abscheidung von Siliziumdioxid aus der Gasphase /
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Handbook of semiconductor interconnection technology /
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Materials issues in vacuum microelectronics : symposium held April 13-16, 1998, San Francisco, California, USA : [MRS Symposium on Materials Issues inVacuum Microelectronics ] /
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Zhu, Wei
1998
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Materials science in microelectronics. 2. The effects of structure on properties in thin films /
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Low and high dielectric constant materials : materials science, processing and reliability issues : proceedings of the Second International Symposium [on Low and High Dielectric Constant Materials] /
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Advances in rapid thermal and integrated processing : NATO advanced study institute on advances in rapid thermal and integrated processing: proceedings : Acquafredda-di-Maratea, 03.07.95-14.07.95.
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Materials science in microelectronics. 1. The relationships between thin film processing and structure /
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Untersuchungen der Elektronenemissionseigenschaften von mikrostrukturierten Metall Isolator Metall (MIM) Dünnschichtkathoden für die parallelprojizierende Elektronenstrahl Lithographie.
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SchOHTA: Handbuch Schichten, Oberflächen, Halbleitertechnologien und Anwendungen und deren Anbieter in Deutschland, Schweiz und Österreich.
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1995
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SchOHTA.
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Dünnschichttechnologien 1990 : Statusseminar Vol 2 : 27.06.90-29.06.90 : Berichte zu F und E Projekten aus dem Förderbereich Physikalische Technologien des Bundesministers für Forschung und Technologie.
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Amorphous semiconductor technology : proceedings of the First International Conference on Amorphous Semiconductor Technology : Asheville, North Carolina, USA, August 24-25, 1989 /
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