1
Handbook of microlithography, micromachining, and microfabrication. 1. Microlithography /
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“...FGME - Microlithography...”
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Materials aspects of x-ray lithography : Symposium on materials aspects of x-ray lithography: papers : MRS spring meeting : San-Francisco, CA, 12.04.93-14.04.93.
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“...FGME - Microlithography...”
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3
Electron beam, x-ray, and ion beam techniques for submicrometer lithographies. 3 /
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Wagner, A.
1984
“...FGME - Microlithography...”
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4
X-ray lithography and applications of soft X-rays to technology : Upton, NY, 19.10.83-20.10.83 /
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“...FGME - Microlithography...”
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Fine line lithography.
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Newman, R.
1980
“...FGME - Microlithography...”
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6
Symposium on electron and ion beam science and technology. 8 : proceedings Seattle, WA, 22.05.78.
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Bakish, R.
1978
“...FGME - Microlithography...”
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