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Select result number 1
1
E-Book
Elektrische und optoelektrische monolithisch integrierte Schaltungen auf InP-basierenden Heterostrukturen [E-Book] /
Hodel, Uwe
2001
“
...
FGMH
-
Metallization
,
physics
of
microelectronics
...
”
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2
E-Book
Mechanische Spannungen und Elektromigration in passivierten Leiterbahnen [E-Book] /
Roths, Christoph
1998
“
...
FGMH
-
Metallization
,
physics
of
microelectronics
...
”
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3
E-Book
Einfluß von Passivierung und von Legierungszusätzen auf die thermischen Spannungen von Leiterbahnen in integrierten Schaltkreisen [E-Book] /
Nielen, Heiko
1998
“
...
FGMH
-
Metallization
,
physics
of
microelectronics
...
”
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4
E-Book
Elastisches und plastisches Verhalten passivierter Leiterbahnen in integrierten Schaltkreisen: FEM-Rechnungen und röntgenographische Spannungsmessungen [E-Book] /
Eppler, Ingo
1998
“
...
FGMH
-
Metallization
,
physics
of
microelectronics
...
”
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5
E-Book
In-situ TEM-Untersuchungen des durch thermische Spannungen und Elektromigration induzierten Materietransports in Al-Leiterbahnen [E-Book] /
Heinen, Dirk
1997
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...
FGMH
-
Metallization
,
physics
of
microelectronics
...
”
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6
E-Book
Mechanische Relaxationsmessungen an Al-Metallisierungsschichten [E-Book] /
Prieler, Martin
1993
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FGMH
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Metallization
,
physics
of
microelectronics
...
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7
E-Book
Mechanische Relaxationsspektroskopie an Aluminium Metallisierungsschichten für die Mikroelektronik [E-Book] /
Vollkommer, Frank
1989
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...
FGMH
-
Metallization
,
physics
of
microelectronics
...
”
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8
Book
Grundlagen der Elektrodiffusion zur Zuverlässigkeitsverbesserung von Al Leitbahnen für hochintegrierte Schaltungen /
Schreiber, H. U.
1985
“
...
FGMH
-
Metallization
,
physics
of
microelectronics
...
”
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Available as
Electronic Edition
7
Print Edition
1
Material Type
Book
8
Type of Literature
Theses
7
Year of Publication
From:
To:
Location
ZB
8
Name
Eppler, Ingo
1
Heinen, Dirk
1
Hodel, Uwe
1
Nielen, Heiko
1
Prieler, Martin
1
Roths, Christoph
1
more ...
Schreiber, H. U.
1
Vollkommer, Frank
1
see all ...
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Subject
electromigration
3
microelectronics
3
X-ray diffraction
2
alloy
2
integrated circuit
2
metallization
2
more ...
thermal stress
2
aluminum
1
dislocation
1
mechanical properties
1
mechanical stress
1
relaxation
1
semiconductor heterostructure
1
transmission electron microscopy
1
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Classification
FGMH - Metallization, physics of microelectronics
8
FCAB - X-ray crystallography, X-ray diffraction
2
FMH - Thermomechanical treatment, precipitations, recrystallization, texture
2
FDCD - Dislocations
1
FGM - Microelectronic technology
1
FGML - Characterization of electronic materials
1
more ...
FMGH - Metallographic microscopy, metallographic stereology
1
FPCD - Anelasticity, internal friction, ultrasonic attenuation
1
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Language
German
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