ZB 99 IFF 8 IBN-1-2 3 IBN-3-4 1

Blewer, R. S. 2 Constantopoulos, N. 2 Ho, P. S. 2 Jaccodine, R. 2 Kaiser, G. 2 Kassabov, J. 2 more ... Katz, A. 2 Murarka, Shyam P. 2 Richter, Harald 2 Wade, T. E. 2 Abernathy, Cammy R. 1 Barfknecht, A. T. 1 Bates, C. W. 1 Bilotta, A. J. 1 Black, R. D. 1 Boergesen, P. 1 Bohling, D. A. 1 Borgesen, P. 1 Bravman, John C. 1 Broadbent, E. K. 1 Butler, J. J. 1 Carrington, R. 1 Christou, A. 1 Christou, Aris 1 Clement, J. Joseph 1 Cohen, S. S. 1 Draper, C. R. 1 Einspruch, N. G. 1 Eppler, Ingo 1 Filter, William F. 1 see all ... less ...

metallization 26 microelectronics 20 VLSI technology 16 electromigration 13 reliability 10 electronic packaging 9 more ... tungsten 6 integrated circuit 5 semiconductor 5 semiconductor heterostructure 5 VLSI (very large scale integration) 4 information technology 4 semiconductor interface 4 thermal stress 4 MOS transistor 3 ULSI (ultra large scale integration) 3 gettering 3 mechanical properties 3 mechanical stress 3 semiconductor processing 3 silicide 3 X-ray diffraction 2 alloy 2 aluminum 2 chemical vapor deposition 2 crystal defect 2 failure 2 gallium arsenide 2 microstructure 2 modeling 2 see all ... less ...

FGMH - Metallization, physics of microelectronics 108 FAF - Materials research - comprehensive works 16 FGM - Microelectronic technology 9 FFPE - Thin film electronic properties, semiconductor interfaces 5 FMT - Refractory metals, refractory alloys 5 FAQ - Materials research - institutions, research and development 3 more ... FGKF - Chemical vapor deposition 3 FJHE - Defects and radiation effects in semiconductors 3 FCAB - X-ray crystallography, X-ray diffraction 2 FFME - Surface forces, adhesion, thin film mechanical properties 2 FJKB - Elemental semiconductors 2 FMH - Thermomechanical treatment, precipitations, recrystallization, texture 2 TBT - Optoelectronics, optical fibers, displays 2 FAAB - Solid state physics - reference books 1 FANE - Computational solid state physics 1 FDCD - Dislocations 1 FDKB - Diffusion in condensed matter 1 FFP - Physics of thin films 1 FFPG - Multilayer systems, quantum structures 1 FGCD - Crystal growth of specific substances 1 FGK - Thin film technology, epitaxy 1 FGML - Characterization of electronic materials 1 FJB - Electric materials 1 FJK - Specific semiconductor materials 1 FJKD - Compound semiconductors 1 FJL - Physics of solid state devices 1 FJLB - Physics of semiconductor devices 1 FMGH - Metallographic microscopy, metallographic stereology 1 FMHF - Grain boundaries, polycrystals 1 FMV - Light metals, metallic foams 1 see all ... less ...

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