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FGT - Microtechnology
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1
Book
Flexible and stretchable triboelectric nanogenerator devices : toward self-powered systems /
Han, Mengdi
2019
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FGN
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Nanotechnologie
...
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2
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Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology /
Madou, Marc J.
2012
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FGN
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Nanotechnologie
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3
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From MEMS to Bio-MEMS and Bio-NEMS : manufacturing techniques and applications /
Madou, Marc J.
2012
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Nanotechnologie
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4
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Manufacturing techniques for microfabrication and nanotechnology /
Madou, Marc J.
2012
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Nanotechnologie
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5
Book
Nanotechnik.
1994
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Nanotechnologie
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5
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Book
5
Type of Literature
Handbook, Textbook
3
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ZB
5
Name
Madou, Marc J.
3
Han, Mengdi
1
Zhang, Haixia
1
Zhang, Xiaosheng
1
Subject
nanotechnology
5
microtechnology
2
nanoelectronics
2
chemical vapor deposition
1
crystallography
1
electric power
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energy harvesting
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etching
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lithography
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microelectromechanical systems (MEMS)
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microfabrication (for microelectronics only)
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nanogenerator
1
photonics
1
quantum mechanics
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scaling theory
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solid state physics
1
triboelectrification
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Classification
FGN - Nanotechnology
5
FGT - Microtechnology
FGP - Nanoelectronics
1
Language
English
4
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