Table of Contents: “... in FePd Films with Ag Underlayer -- Thermal Dispergation of Pb-In Alloys Films on the Molybdenum Substrate -- Structure and Low-temperature Properties of U-15 at.% T Alloys (T = Mo, Nb, Pt, Ru, Ti) -- Multilayer PECVD Si-C-N Films....”

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Table of Contents: “...Introduction -- The Properties of Vertically-oriented Graphene -- PECVD Synthesis of Vertically-oriented Graphene: Mechanism and Plasma Sources -- PECVD Synthesis of Vertically-oriented Graphene: Precursor and Temperature Effects -- Atmospheric PECVD...”

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Table of Contents: “... DEPOSITION METHOD -- PECVD GROWTH OF CARBON NANOTUBES -- CARBON NANOTUBES GROWTH AND ANCHORAGE TO CARBON FIBRES -- CVD SYNTHESIS OF CARBON NANOTUBES ON DIFFERENT SUBSTRATES -- INFLUENCE OF THE SUBSTRATE TYPES AND TREATMENTS ON CARBON NANOTUBE GROWTH BY CHEMICAL...”

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Table of Contents: “... -- Overall process -- Safety issues -- 22 Chemical vapor deposition (CVD) and infiltration (CVI) -- 23 Plasma-enhanced chemical vapor deposition (PECVD) -- Nine High Temperature Furnace Engineering -- Types of high temperature furnaces -- Safety issues -- 24...”

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Table of Contents: “...Plasma Etching -- to Plasma Etching -- Plasma Chemistry, Basic Processes and PECVD -- The Role of Ions in Reactive Ion Etching with Low Density Plasmas -- SiO2 Etching in High-Density Plasmas: Differences with Low-Density Plasmas -- Plasma Deposition...”

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Table of Contents: “... Assisted Method at Temperatures Lower than 1000°C -- Si?C1?? Alloys Deposited on Silicon Using a Low-Cost, Hot-Wall, LPCVD Reactor -- Low Temperature PECVD Growth and Characterization of a-SiC:H Films Deposited from Silacyclobutane and Silane/Methane Precursor...”

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Table of Contents: “...*Defect Aspects of Advanced Device Technologies -- Field Effect Analysis in Low Voltage Operation a-Si:H Thin Film Transistors with Very Thin PECVD a-SiO2 Gate Dielectric -- *Silicon and Silicon: Germanium Alloy Growth; Means and Applications...”

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Table of Contents: “... Doped Amorphous Silicon Dioxide Thin Films -- Low Temperature PECVD Silicon Rich Silicon Dioxide Films Doped With Fluorine -- Transport, Trapping and Breakdown -- High Field Transport in SiO2 -- Hot Electrons in SiO2: Ballistic and Steady State Transport...”

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Table of Contents: “... Deposition (Remote PECVD) -- Anodic SiO2 for Low Temperature Gate Dielectrics -- II. Thermal and Structural Properties of SiO2 -- Local Atomic Structure of Thermally Grown SiO2 Films -- Structural Relaxation and Growth of SiO2 Films on Si -- Structural Relaxation...”

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