1
Integration von Nanostrukturen durch alternative Methoden : Mizellen-Deposition, Template-Wachstum und Nanogaps /
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Subject (ZB): “...electron beam lithography...”
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2
Integration von Nanostrukturen durch alternative Methoden : Mizellen-Deposition, Template-Wachstum und Nanogaps [E-Book] /
Subject (ZB): “...electron beam lithography...”

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3
Surface patterning by means of soft lithography for molecular and bio-electronics [E-Book] /
Subject (ZB): “...electron beam lithography...”

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4
Handbook of microlithography, micromachining, and microfabrication. 1. Microlithography /
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Subject (ZB): “...electron beam lithography...”
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5
Emerging lithographic technologies : proceedings 10-11 March 1997 Santa Clara, California /
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Subject (ZB): “...electron beam lithography...”
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6
Advances in electronics and electron physics. Microelectronics and microscopy /
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Subject (ZB): “...electron beam lithography...”
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7
Präparation und Charakterisierung von Relaxations-Oszillatoren aus Niob-Mikrobrücken [E-Book] /
Subject (ZB): “...electron beam lithography...”

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8
The production of nanometre structures in inorganic materials by electron beams of high current density.
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Subject (ZB): “...electron beam lithography...”
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9
Electron beam, x-ray, and ion beam techniques for submicrometer lithographies. 3 /
Book
Wagner, A.
1984
Subject (ZB): “...electron beam lithography...”
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10
Fine line lithography.
Book
Newman, R.
1980
Subject (ZB): “...electron beam lithography...”
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11
On the throughput optimization of electron beam lithography systems /
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Subject (ZB): “...electron beam lithography...”
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