1
Materials reliability in microelectronics. 6 : symposium held April 8-12.1996, San Francisco, California, USA /
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2
Gate dielectrics and MOS ULSls : principles, technologies and applications /
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3
Materials reliability in microelectronics. 5 : symposium San-Francisco, CA, 17.04.95-21.04.95.
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Subject (ZB): ...thin film...
4
Materials reliability in microelectronics. 4 : symposium San-Francisco, CA, 05.04.94-08.04.94.
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5
Materials reliability in microelectronics. 3 : symposium San-Francisco, CA, 12.04.93-15.04.93.
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6
Mechanical behavior of materials and structures in microelectronics : Symposium on the mechanical behavior of materials and structures in microelectronics: proceedings : MRS spring meeting 1991: symposium H : Anaheim, CA, 30.04.91-03.05.91.
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Suhir, E.
1991
...FFME - Surface forces, adhesion, thin film mechanical properties...
7
Chemical perspectives of microelectronics materials. 0002 : Biennial Meeting of Chemical Perspectives of Microelectronic Materials : 0002: proceedings : Materials Research Society Fall Meeting. 1990 : Boston, MA, 26.11.90-28.11.90.
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8
Electronic materials science : for integrated circuits in Si and GaAs /
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9
Tungsten and other advanced metals for VLSI/ULSI applications. 0005 : Workshop on Tungsten and Other Advanced Metals for VLSI/ULSI Applications : 0005: proceedings : San-Mateo, CA, Tokyo, 20.09.89-21.09.89 ; 19.10.89-20.10.89
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10
Microelectronics packaging handbook /
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11
Second German-Greek workshop on materials research for information technology, May 22 - May 23, 1989 [E-Book] /
12
Microelectronic materials.
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13
Diffusion phenomena in thin films and microelectronic materials /
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14
Tungsten and other refractory metals for VLSI applications. 3 : Workshop on tungsten and other refractory metals for vlsi applications. 1987: proceedings : Yorktown-Heights, NY, 07.10.87-09.10.87.
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15
Microstructural science for thin film metallisations in electronic applications : Microstructural science for thin film metallizations in electronic applications: topical symposium: proceedings : Annual meeting of the Minerals, Metals and Materials Society. 1988 : Phoenix, AZ, 26.01.88-27.01.88.
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16
Surface and colloid science in computer technology /
Book
...FFME - Surface forces, adhesion, thin film mechanical properties...
17
Tungsten and other refractory metals for VLSI applications. 2 : Workshop on Tungsten and Other Refractory Metals for VLSI Application : 1986: proceedings : Palo-Alto, CA, 12.11.86-14.11.86.
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18
International School on Physical Problems in Microelectronics : 0005: proceedings : ISPPME. 1987 : Varna, 18.05.87-23.05.87.
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...FFPE - Thin film electronic properties, semiconductor interfaces...
19
VLSI metallization.
Book
20
Tungsten and other refractory metals for VLSI applications. 1 : Workshop on tungsten and other refractory metals for VLSI applications. 1985: proceedings : Workshop on tungsten and other refractory metals for VLSI applications. 1984: proceedings : Albuquerque, NM, 07.10.85-09.10.85 ; 12.11.84-13.11.84.
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