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FGN - Nanotechnology
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FGN - Nanotechnology
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From MEMS to Bio-MEMS and Bio-NEMS : manufacturing techniques and applications /
Madou, Marc J.
2012
Subject (ZB):
“
...
microelectromechanical
systems
(
MEMS
)...
”
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2
E-Book
Fundamentals of microfabrication and nanotechnology. Volume III : from MEMS to bio-MEMS and bio-NEMS : manufacturing techniques and applications [E-Book] /
Madou, Marc J.
2011
Subject (ZB):
“
...
microelectromechanical
systems
(
MEMS
)...
”
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2
Name
Madou, Marc J.
2
Subject
microelectromechanical systems (MEMS)
2
nanoelectronics
2
nanotechnology
2
scaling theory
2
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FGN - Nanotechnology
FGT - Microtechnology
2
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English
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