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RF-MEMS technology for high-performance passives : the challenge of 5G mobile applications [E-Book] /
Subject (ZB): “...microelectromechanical systems (MEMS)...”

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Introduction to BioMEMS /
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Subject (ZB): “...microelectromechanical systems (MEMS)...”
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From MEMS to Bio-MEMS and Bio-NEMS : manufacturing techniques and applications /
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Subject (ZB): “...microelectromechanical systems (MEMS)...”
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Fundamentals of microfabrication and nanotechnology. Volume III : from MEMS to bio-MEMS and bio-NEMS : manufacturing techniques and applications [E-Book] /
Subject (ZB): “...microelectromechanical systems (MEMS)...”

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Fundamentals of BioMEMS and medical microdevices /
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Subject (ZB): “...microelectromechanical systems (MEMS)...”
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