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1
Book
Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology /
Madou
,
Marc
J
.
2012
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,
Marc
J
....
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2
Book
From MEMS to Bio-MEMS and Bio-NEMS : manufacturing techniques and applications /
Madou
,
Marc
J
.
2012
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,
Marc
J
....
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3
Book
Manufacturing techniques for microfabrication and nanotechnology /
Madou
,
Marc
J
.
2012
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Madou
,
Marc
J
....
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Available as
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3
Material Type
Book
3
Type of Literature
Handbook, Textbook
Year of Publication
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Location
ZB
3
Name
Madou, Marc J.
3
Subject
nanotechnology
3
chemical vapor deposition
1
crystallography
1
etching
1
lithography
1
microelectromechanical systems (MEMS)
1
more ...
microfabrication (for microelectronics only)
1
microtechnology
1
nanoelectronics
1
photonics
1
quantum mechanics
1
scaling theory
1
solid state physics
1
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Classification
FGN - Nanotechnology
3
FGT - Microtechnology
3
Language
English
3
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