Skip to content
Toggle navigation
VuFind
0
Items in e-Shelf
(Full)
History
User Account
Logout
User Account
Help
English
Deutsch
Books & more
Articles & more
JuSER
All Fields
Title
Journal Title
Name
Institution
Subject
Classification
Shelf Classification
Table of Contents
DOI
ISBN/ISSN
Call number
Report Number
Barcode
Full Texts (available in selection)
Find
Advanced
Reset Filters
scaling theory
Reset Filters
Show filters (1)
scaling theory
Ask a Librarian
Books & more
: Hits
1 - 2
of
2
sort by
Relevance
Year (descending)
Year (ascending)
Call Number
Author
Title
Select all titles on this page
Email
Export
Print
Save
Add to e-Shelf
Select result number 1
1
Book
From MEMS to Bio-MEMS and Bio-NEMS : manufacturing techniques and applications /
Madou
,
Marc
J
.
2012
Other Personal Name(s):
“
...
Madou
,
Marc
J
....
”
Call number:
Loading...
Located:
Loading...
Table of Contents
Literature Request
Loan/Reservation
Favorites
Saved in:
QR Code
Select result number 2
2
E-Book
Fundamentals of microfabrication and nanotechnology. Volume III : from MEMS to bio-MEMS and bio-NEMS : manufacturing techniques and applications [E-Book] /
Madou
,
Marc
J
.
2011
Other Personal Name(s):
“
...
Madou
,
Marc
J
....
”
Full text
Favorites
Saved in:
QR Code
Select all titles on this page
Email
Export
Print
Save
Add to e-Shelf
Back
Narrow Search Results
Available as
Electronic Edition
1
Print Edition
1
Material Type
Book
2
Type of Literature
Handbook, Textbook
1
Year of Publication
From:
To:
Location
ZB
2
Name
Madou, Marc J.
2
Subject
microelectromechanical systems (MEMS)
2
nanoelectronics
2
nanotechnology
2
scaling theory
Classification
FGN - Nanotechnology
2
FGT - Microtechnology
2
Language
English
2
×
Loading...
