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Electron beam, x-ray, and ion beam techniques for submicrometer lithographies. 0005 : Santa-Clara, CA, 11.03.1986-12.03.1986 /
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Optical microlithography 0005 : Santa-Clara, CA, 13.03.86-14.03.86 /
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Microcircuit engineering 1985 : ME 1985 : proceedings of the International Conference on Microlithography : Rotterdam, September 23 - 25, 1985 /
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Maskentechnik für Mikroelektronik Bausteine : Tagung : München, 14.11.85
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Maskentechnik für Mikroelektronik Bausteine : Tagung : München, 15.11.84
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1985
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Microcircuit engineering. 1984 : Microcircuit engineering conference. 1984: proceedings : ME. 1984: proceedings : Berlin, 25.09.1984-29.09.1984.
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Optical microlithography. 0004 : Santa-Clara, CA, 13.03.1985-14.03.1985 n/
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Electron beam interactions with solids for microscopy, microanalysis and microlithography : Pfefferkorn conference 0001 : Monterey, CA, 18.04.82-23.04.82 /c edited by D. F. Kyser
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Electron beam, x-ray, and ion beam techniques for submicrometer lithographies. 3 /
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Wagner, A.
1984
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Materials for microlithography: radiation sensitive polymers : Based on a symposium : American Chemical Society meeting. 0187 : Saint-Louis, MO, 08.04.84-13.04.84.
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Optical microlithography symposium. 0003 : Santa-Clara, CA, 14.03.1984-15.03.1984 : Technology for the next decade /
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X-ray lithography and applications of soft X-rays to technology : Upton, NY, 19.10.83-20.10.83 /
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Photomasks, scales, and gratings /
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Introduction to microlithography : Theory, materials, and processing : American Chemical Society meeting. 0185 : Seattle, WA, 20.03.83-25.03.83.
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Microcircuit engineering. 1983 : Microcircuit engineering conference. 1983: proceedings : ME. 1983: proceedings : Cambridge, 25.09.1983-29.09.1983 /
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Polymer materials for electronic applications : Chemical congress of the north american continent 2 : ACS national meeting 180 : Las-Vegas, NV, 26.08.80-27.08.80.
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Submicron lithography : Santa-Clara, CA, 29.03.1982-30.03.1982 /
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Semiconductor Microlithography Seminar. 0006 : San-Jose, CA, 30.03.1981-31.03.1981 /
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Dey, J.
1981
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Electron-beam technology in microelectronic fabrication /
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Symposium on electron and ion beam science and technology: international conference. 9 : proceedings Saint-Louis, MO, 05.80.
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Bakish, R.
1980
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