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FGN - Nanotechnology
Madou, Marc J.
microelectromechanical systems (MEMS)
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FGN - Nanotechnology
Madou, Marc J.
microelectromechanical systems (MEMS)
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From MEMS to Bio-MEMS and Bio-NEMS : manufacturing techniques and applications /
Madou, Marc J.
2012
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Fundamentals of microfabrication and nanotechnology. Volume III : from MEMS to bio-MEMS and bio-NEMS : manufacturing techniques and applications [E-Book] /
Madou, Marc J.
2011
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Madou, Marc J.
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microelectromechanical systems (MEMS)
nanoelectronics
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nanotechnology
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scaling theory
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FGN - Nanotechnology
FGT - Microtechnology
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