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ZB
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FGK - Thin film technology, epitaxy
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FGK - Thin film technology, epitaxy
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1
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Deposition of diamond-like superhard materials /
Kulisch, Wilhelm.
1999
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2
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Deposition technologies for films and coatings : developments and applications /
Bunshah, R. F.
1982
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3
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Epitaxy of semiconductor layered structures : Symposium on Epitaxy of Semiconductor Layered Structures: papers : Fall Meeting of the Materials Research Society. 1987 : Boston, MA,...
Tung, R. T.
1988
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4
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Modeling and simulation of thin film processing : Symposium on modeling and simulation of thin film processing: proceedings: papers : San-Francisco, CA, 17.04.95-20.04.95.
Srolovitz, D. J.
1995
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5
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Preparation and properties of thin films.
Tu, K. N.
1982
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6
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Silicon on insulator and buried metals in semiconductors: symposium : Boston, MA, 30.11.87-03.12.87.
Sturm, J. C.
1988
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Print Edition
Material Type
Book
6
Type of Literature
Conference Publication
3
Handbook, Textbook
1
Year of Publication
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IFF
ZB
Name
Bunshah, R. F.
1
Kulisch, Wilhelm.
1
Srolovitz, D. J.
1
Sturm, J. C.
1
Tu, K. N.
1
Tung, R. T.
1
Subject
thin film
2
Monte Carlo method
1
chemical vapor deposition
1
computer simulation
1
diamond film
1
evolution
1
more ...
film deposition
1
grain boundary
1
grain growth
1
growth
1
hardness
1
ion implantation
1
modeling
1
molecular dynamics
1
nucleation
1
plasma etching
1
plasma processing
1
point defect
1
semiconducting film
1
simulation
1
sputtering
1
surface diffusion
1
texture
1
thin film technology
1
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Classification
FGK - Thin film technology, epitaxy
FAF - Materials research - comprehensive works
2
FFP - Physics of thin films
1
FFPE - Thin film electronic properties, semiconductor interfaces
1
FGGB - Ion implantation, ion beam synthesis
1
FNPD - Hard materials, refractory compounds
1
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FNX - Carbon, carbon materials
1
FPU - Corrosion protection, surface coating
1
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Language
English
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