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Carius, R.
Journal Article
Ionentechnik
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Carius, R.
Journal Article
Ionentechnik
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1
Journal Article
Efficient electroluminescence from rare earth doped MOS diodes
Wang, S.
2001
Materials science and engineering / B, 81 (2001) S. 102 - 104
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2001
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2
Journal Article
Study of structure and optical properties of beta-FeSi2 precipitates formed by ion-implantation of Fe+ in Si (100) and effect of co-implantation of Fe+ and Si+ in amorphous SiO2
Oyoshi, A. N.
2001
Thin solid films, 381 (2001) S. 194 - 201
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3
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Formation of beta-FeSi2 precipitates at the SiO2/Si interface by Fe+ ion-implantation and their structural and optical properties
Oyoshi, A. N.
2001
Thin solid films, 381 (2001) S. 202 - 208
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4
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Modification of beta-FeSi2 precipitate layers in silicon by hydrogen implantation
Schuller, B.
2001
Microelectronic engineering, 55 (2001) S. 219 - 225
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Journal Article
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Carius, R.
Mantl, S.
3
Lenssen, D.
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Oyoshi, A. N.
2
Buchal, C.
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Coffa, S.
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Schuller, Bernd
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Wang, S.
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Research Program
Grundlagen und Technologie von Dünnschichtsolarzellen
4
Ionentechnik
Contributing Institute
Institut für Halbleiterschichten und Bauelemente; ISG-1
4
Institut für Photovoltaik; IPV
4
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2001
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