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Hoffmann-Eifert, S.
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Waser, R.
Conference Presentation
2009
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Hoffmann-Eifert, S.
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Waser, R.
Conference Presentation
2009
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Conference Presentation
Liquid injection atomic layer deposition of metallic Ru and RuO2 thin films for electrode applications
Hoffmann-Eifert, S.
2009
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2
Conference Presentation
Liquid injection atomic layer deposition of lead zirconate titanate thin films for three dimensional ferroelectric capacitor structures
Hoffmann-Eifert, S.
2009
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3
Conference Presentation
Strontium ruthenate (SRO) - strontium titanate (STO) thin film capacitor by RF sputtering for DRAM application
Schmelzer, S.
2009
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Conference Presentation
Liquid injection atomic layer deposition of metallic Ru thin films from Ru(tmhd)3 and of high-k TiO2 thin films from Ti(O-i-Pr)2(tmhd)2
Hoffmann-Eifert, S.
2009
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Conference Presentation
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Hoffmann-Eifert, S.
Waser, R.
Kim, S. K.
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Bräuhaus, D.
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Böttger, U.
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Hwang, C.S.
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Meuffels, Paul
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Reinig, P.
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Schmelzer, S.
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Schroeder, H.
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Watanabe, T.
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Research Program
Grundlagen für zukünftige Informationstechnologien
4
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Elektronische Materialien; IFF-6
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JARA-FIT; JARA-FIT
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2009
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