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Journal of vacuum science & technology / B, 19 (2001) S. 1721
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Journal Article
Electronics letters, 37 (2001) S. 1478
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3
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Physik mikrostrukturierter Halbleiter, 23 (2001) S. 31
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4
Journal Article
Kuzmik, J.
2001
Vacuum, 61 (2001) S. 333
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5
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Marso, M.
2001
Electronics letters, 37 (2001) S. 1478
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6
Journal Article
Marso, M.
2001
Physica status solidi / A, 188 (2001) S. 199
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7
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Vacuum, 61 (2001) S. 323
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