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Kordos, P.
Ionen- und Lithographietechnik
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Kordos, P.
Ionen- und Lithographietechnik
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1
Conference Presentation
Nanostrukturierung und optische Lithographie mit DUV-Photoresists bei der Herstellung vertikaler MOSFETs
Trellenkamp, S.
2001
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Journal Article
Photoenhanced wet etching of gallium nitride in KOH-based solution
Skriniarova, J.
2001
Journal of vacuum science & technology / B, 19 (2001) S. 1721
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Conference Presentation
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Kordos, P.
Bochem, P.
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Flücken, R.
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Fox, P. T.
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Lüth, H.
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Marso, M.
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Moers, J.
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Skriniarova, J.
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Research Program
Halbleiterbauelemente und Analytik
2
Ionen- und Lithographietechnik
Halbleiterschichtsysteme und Mesoskopische Strukturen
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Contributing Institute
Institut für Bio- und Chemosensoren; ISG-2
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Institut für Halbleiterschichten und Bauelemente; ISG-1
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2001
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