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Lüth, H.
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Marso, M.
Halbleiterschichtsysteme und Mesoskopische Strukturen
Conference Presentation
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Lüth, H.
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Marso, M.
Halbleiterschichtsysteme und Mesoskopische Strukturen
Conference Presentation
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Conference Presentation
Influence of AlN and GaN nucleation layers on the properties of doped and undoped AlGaN/GaN HEMT structures grown by MOVPE
Alam, A.
2001
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2
Conference Presentation
Nanostrukturierung und optische Lithographie mit DUV-Photoresists bei der Herstellung vertikaler MOSFETs
Trellenkamp, S.
2001
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Conference Presentation
AlGaN/GaN HEMT optimization using the RoundHEMT technology
Marso, M.
2001
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Kordos, P.
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Lüth, H.
Marso, M.
Alam, A.
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Hardtdegen, Hilde
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Bay, H.
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Flücken, R.
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Fox, P. T.
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Juergensen, H.
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Research Program
Halbleiterschichtsysteme und Mesoskopische Strukturen
Halbleiterbauelemente und Analytik
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Ionen- und Lithographietechnik
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Ionentechnik
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Institut für Halbleiterschichten und Bauelemente; ISG-1
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Institut für Bio- und Chemosensoren; ISG-2
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2001
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