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Regnery, S. AND Schumacher, M. AND Waser, R.

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Regnery, S. AND Schumacher, M. AND Waser, R.

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Conference Presentation 5 Contribution to a book 3 Contribution to a conference proceedings 3 Journal Article 3 Poster 3

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Contribution to a book
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Nucleation and growth of thin (Ba, Sr) TiO3 films in a MOCVD reactor

Regnery, S.
2004

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Conference Presentation

MOCVD of SrTa2O6 thin films for high-k applications

Regnery, S.
2004

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Growth of (Ba,Sr)TiO3 thin films by MOCVD: stoichiometry effects

Ehrhart, P.
2003

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Conference Presentation

MOCVD of (BaSr)TiO3: Nucleation and growth

Regnery, S.
2003

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5

Contribution to a book
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Nucleation and growth of thin (Ba,Sr)TiO3 films in a MOCVD reactor

Regnery, S.
2003

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Journal Article

(Ba,Sr)TiO3 thin film growth in a batch processing MOCVD reactor

Regnery, S.
2003

Journal of the European Ceramic Society, 24 (2003) S. 271-276

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(Ba,Sr)TiO3 thin films growth in a batch processing MOCVD reactor

Regnery, S.
2002

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Conference Presentation

Nucleation and growth of thin (Ba,Sr)TiO3 films in a MOCVD reactor

Regnery, S.
2002

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Journal Article

Growth of (Ba,Sr)TiO3 thin films by MOCVD : stoichiometry effects

Ehrhart, P.
2002

Integrated ferroelectrics, 45 (2002) S. 59 - 68

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10

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Growth of (Ba,Sr)TiO3 thin films in a multi-wafer MOCVD reactor

Ehrhart, P.
2001

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Journal Article

BST thin films grown in a multi-wafer MOCVD reactor

Fitsilis, F.
2001

Journal of the European Ceramic Society, 21 (2001) S. 1547 - 1551

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Conference Presentation

Growth of (Ba,Sr) TiO3 thin films in a multiwafer MOCVD reactor

Ehrhart, P.
2000

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Deposition of BST thin films in a multi-wafer MOCVD reactor

Ehrhart, P.
2000

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Conference Presentation

BST thin films growth in a multiwafer MOCVD reactor

Fitsilis, F.
2000

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Publications database 14

Conference Presentation 5 Contribution to a book 3 Contribution to a conference proceedings 3 Journal Article 3 Poster 3

Regnery, S. Schumacher, M. Waser, R. Ehrhart, P. 13 Schienle, F. 11 Fitsilis, F. 10 more ... Jia, C. L. 5 Juergensen, H. 5 Dauelsberg, M. 4 Ding, Y. 4 Jürgensen, H. 4 Strzyzewski, P. 4 Szot, K. 3 Haselier, H. 2 Krumpen, W. 2 Lehnen, P. 2 Lindner, J. 2 McEntee, T. 2 Miedl, S. 2 Thomas, R. 2 Ehrhart, F. 1 He, J. 1 Jia, C. 1 Miedl, St. 1 see all ... less ...

Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik 9 Festkörperforschung für die Informationstechnik 5

Elektrokeramische Materialien; IFF-EKM 8 Mikrostrukturforschung; IFF-IMF 5 Center of Nanoelectronic Systems for Information Technology; CNI 3 Elektronische Materialien; IFF-IEM 3 Institut für Festkörperforschung; IFF 3 Zentralabteilung für Chemische Analysen; ZCH 1

2000 3 2002 3 2003 3 2004 3 2001 2

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