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Schumacher, M. AND Waser, R.

Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik

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Schumacher, M. AND Waser, R.

Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik

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Conference Presentation 4 Contribution to a book 2 Contribution to a conference proceedings 2 Journal Article 2 Poster 2

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Contribution to a book
Contribution to a conference proceedings

Nucleation and growth of thin (Ba, Sr) TiO3 films in a MOCVD reactor

Regnery, S.
2004

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Conference Presentation

MOCVD of SrTa2O6 thin films for high-k applications

Regnery, S.
2004

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Growth of (Ba,Sr)TiO3 thin films by MOCVD: stoichiometry effects

Ehrhart, P.
2003

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Conference Presentation

Comparison of hafnium precursors for the MOCVD of HfO2 for gate dielectric applications

Teren, A. R.
2003

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Conference Presentation

MOCVD of (BaSr)TiO3: Nucleation and growth

Regnery, S.
2003

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Contribution to a book
Contribution to a conference proceedings

Nucleation and growth of thin (Ba,Sr)TiO3 films in a MOCVD reactor

Regnery, S.
2003

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Journal Article

(Ba,Sr)TiO3 thin film growth in a batch processing MOCVD reactor

Regnery, S.
2003

Journal of the European Ceramic Society, 24 (2003) S. 271-276

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(Ba,Sr)TiO3 thin films growth in a batch processing MOCVD reactor

Regnery, S.
2002

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Conference Presentation

Nucleation and growth of thin (Ba,Sr)TiO3 films in a MOCVD reactor

Regnery, S.
2002

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Journal Article

Growth of (Ba,Sr)TiO3 thin films by MOCVD : stoichiometry effects

Ehrhart, P.
2002

Integrated ferroelectrics, 45 (2002) S. 59 - 68

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Publications database 10

Conference Presentation 4 Contribution to a book 2 Contribution to a conference proceedings 2 Journal Article 2 Poster 2

Schumacher, M. Waser, R. Ehrhart, P. 9 Regnery, S. 9 Jia, C. L. 6 Schienle, F. 6 more ... Fitsilis, F. 5 Ding, Y. 4 Juergensen, H. 3 Szot, K. 3 Haselier, H. 2 Krumpen, W. 2 Lehnen, P. 2 McEntee, T. 2 Thomas, R. 2 Baumann, P. K. 1 Ehrhart, F. 1 He, J. 1 He, J. Q. 1 Jones, A. C. 1 Jürgensen, H. 1 Leedham, T. J. 1 Lindner, J. 1 Miedl, S. 1 Miedl, St. 1 Rushworth, S. R. 1 Teren, A. R. 1 see all ... less ...

Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik

Elektrokeramische Materialien; IFF-EKM 7 Mikrostrukturforschung; IFF-IMF 6 Center of Nanoelectronic Systems for Information Technology; CNI 3 Elektronische Materialien; IFF-IEM 3 Zentralabteilung für Chemische Analysen; ZCH 1

2003 4 2002 3 2004 3

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