Skip to content
Toggle navigation
VuFind
0
Items in e-Shelf
(Full)
History
User Account
Logout
User Account
Help
English
Deutsch
Books & more
Articles & more
JuSER
All Fields
Title
Name
Research Program
Contributing Institute
DOI
Scientific Report (Year)
Year of Publication
Full Texts (available in selection)
Find
Advanced
Reset Filters
Halbleiter-Nanoelektronik; IBN-1
Holländer, Bernhard
AND
Breuer, U.
Reset Filters
Show filters (3)
Halbleiter-Nanoelektronik; IBN-1
Holländer, Bernhard
AND
Breuer, U.
Ask a Librarian
Document Type within your search.
Document Type within your search.
Journal Article
2
Poster
2
Contribution to a book
1
Talk (non-conference)
1
JuSER
: Hits
1 - 6
of
6
sort by
Relevance
Year (descending)
Year (ascending)
Title
Year (descending), Title A-Z
Select all titles on this page
Email
Export
Print
Save
Add to e-Shelf
Select result number 1
1
Journal Article
Atomic layer deposition of HfO2 and Al2O3 layers on 300 mm Si wafers for gate stack technology
Lupták, R.
2011
Journal of vacuum science & technology / B, 29 (2011) S. 01A301
Favorites
Saved in:
QR Code
JuSER Publications Portal
Select result number 2
2
Contribution to a book
High temperature implantation: a solution for N-type junctions in strained silicon
Heiermann, W.
2009
Favorites
Saved in:
QR Code
JuSER Publications Portal
Select result number 3
3
Journal Article
High temperature antimony ion implantation in strained silicon-on-insulator
Buca, D.
2009
Solid state electronics, 53 (2009) S. 828 - 832
Favorites
Saved in:
QR Code
JuSER Publications Portal
Select result number 4
4
Talk (non-conference)
High temperature implantation: a solution for N-type junctions in strained silicon
Heiermann, W.
2009
Favorites
Saved in:
QR Code
JuSER Publications Portal
Select result number 5
5
Poster
Study of Antimony activation in strained silicon
Buca, D.
2008
Favorites
Saved in:
QR Code
JuSER Publications Portal
Select result number 6
6
Poster
High temperature Antimony implantation in strained Silicon
Heiermann, W.
2008
Favorites
Saved in:
QR Code
JuSER Publications Portal
Select all titles on this page
Email
Export
Print
Save
Add to e-Shelf
/* Narrow Search Options */ ?>
Back
Narrow Search Results
Collection
Publications database
6
Document Type
Journal Article
2
Poster
2
Contribution to a book
1
Talk (non-conference)
1
Name
Breuer, U.
Holländer, Bernhard
Buca, Dan Mihai
5
Trinkaus, H.
5
Heiermann, W.
4
Mantl, S.
4
more ...
Ghyselen, B.
2
Mantl, M.
2
Baumann, P.K.
1
Besmehn, A.
1
Dürgün-Özben, Eylem
1
Feste, S.
1
Habicht, S.
1
Heuken, M.
1
Lenk, Steffi
1
Lopes, J.M.J.
1
Lupták, R.
1
Schnee, M.
1
Schubert, Jürgen
1
Tiedemann, Andreas
1
see all ...
less ...
Research Program
Grundlagen für zukünftige Informationstechnologien
6
Contributing Institute
Halbleiter-Nanoelektronik; IBN-1
JARA-FIT; JARA-FIT
4
Center of Nanoelectronic Systems for Information Technology; CNI
2
Halbleiter-Nanoelektronik; PGI-9
1
Scientific Report
2009
3
2008
2
2011
1
Year of Publication
From:
To:
/* End Narrow Search Options */ ?>
×
Loading...