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Journal Article
Journal of vacuum science & technology / B, 33 (2015) 1, S. 01A104
“...Schäfer, Anna...”
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Journal of alloys and compounds, 651 (2015) S. 514–520
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Conference Presentation
2015
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Journal Article
Semiconductor science and technology, 29 (2014) 7, S. 075005
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2014
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6
Journal Article
Microelectronic engineering, 109 S. 109 - 112
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