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1
Contribution to a book
Contribution to a conference proceedings
Thin strain relaxed SiGe buffer layers on Si and SOI made by He ion implantation and annealing
Mantl, S.
2003
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Hogg
, S.
M
....
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Poster
Thin strain relaxed SiGe buffer layers on Si and SOI made by He ion implantation and annealing
Mantl, S.
2003
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...
Hogg
, S.
M
....
”
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3
Talk (non-conference)
Formation of shallow junctions in Si-nanostructures
Hogg
, S.
M
.
2001
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...
Hogg
, S.
M
....
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Contribution to a book
1
Contribution to a conference proceedings
1
Poster
1
Talk (non-conference)
1
Name
Hogg, S. M.
3
Lenk, Steffi
3
Mantl, S.
3
Bauer, M.
2
Hackbarth, T.
2
Holländer, Bernhard
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Loo, R.
2
Luysberg, Martina
2
Bay, H. L.
1
Herzog, H. J.
1
Herzog, H.-J.
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Hueging, N.
1
Hüging, N.
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Moers, J.
1
Rije, E.
1
Trellenkamp, Stefan
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Kondensierte Materie
2
Ionentechnik
1
Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik
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Contributing Institute
Institut für Halbleiterschichten und Bauelemente; ISG-1
2
Mikrostrukturforschung; IFF-IMF
2
Scientific Report
2003
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