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Buchal, C.
2000
Materials science in semiconductor processing, 3 (2000) S. 399
...Löken, M....
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Buchal, C.
2000
Journal of vacuum science & technology / A, 18 (2000) S. 630
...Löken, M....
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IEEE journal of selected topics in quantum electronics, 4 (1999) S. 970
...Löken, M....