1
2
3
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Microelectronic engineering, 64 (2002) S. 205 - 209
...2002...
6
Kluth, P.
2002
Microelectronic engineering, 64 (2002) S. 163 - 171
...2002...
7
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9
Materials science and engineering / B, 89 (2002) S. 73 - 76
...2002...
10
Microelectronic engineering, 60 (2002) S. 191 - 196
...2002...
11
Kluth, P.
2002
Microelectronic engineering, 60 (2002) S. 239 - 245
...2002...
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