Plasma etching in semiconductor fabrication.
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| Personal Name(s): | Morgan, R. A. |
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| Imprint: |
Amsterdam :
Elsevier,
1985.
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| Physical Description: |
X, 316 S. |
| Note: |
englisch |
| ISBN: |
0444424695 9780444424198 9780444424693 0444424199 |
| Series Title: |
Plasma technology ;
0001. |
| Subject (ZB): | |
| Classification: | |
| Shelf Classification: |
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Reading Room  Call Number: FGK 101 Barcode: 1086003740
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