Plasma etching in semiconductor fabrication.
Saved in:
Personal Name(s): | Morgan, R. A. |
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Imprint: |
Amsterdam :
Elsevier,
1985.
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Physical Description: |
X, 316 S. |
Note: |
englisch |
ISBN: |
0444424695 9780444424198 9780444424693 0444424199 |
Series Title: |
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Plasma technology ;
0001. |
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Reading Room Call number: FGK 101 Barcode: 1086003740 Available |