Leading edge of VLSI manufacturing technology : Semicon / Osaka Technology Seminar : 1987: proceedings : Osaka, 25.06.87-26.06.87.
Saved in:
Imprint: |
Mountain-View, CA :
Semiconductor Equipment and Materials Institute,
1987.
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Physical Description: |
II, 328 S. |
Note: |
sonstige |
Keywords: |
VLSI technology |
Classification: |
ZB | |
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Open Stacks Call number: B 064245'01' Barcode: 1088103313 Available |