Einspruch, N. G. 14 Cullis, A. G. 6 Thompson, L. F. 3 Wolf, Stanley. 3 Ahmed, Haroon 2 Biswas, Rajendra Narayanan 2 more ... Blais, P. D. 2 Blewer, R. S. 2 Board, K. 2 Campbell, S. A. 2 Cleaver, John R. A. 2 Einspruch, Norman G. 2 Hartnagel, Hans Ludwig 2 Hoppe, Bernhard. 2 Horne, Douglas F. 2 Jones, Geraint A. C. 2 Levy, R. A. 2 MacGuire, G. E. 2 Murarka, Shyam P. 2 Nishizawa, J. 2 Rai-Choudhury, P. 2 Schroder, Dieter K. 2 Sze, S. M. 2 Yanof, A. W. 2 Ballantyne, J. M. 1 Ballantyne, J. P. 1 Barbe, D. F. 1 Barker, J. R. 1 Bate, R. T. 1 Bean, Kenneth E. 1 see all ... less ...

microelectronics 24 VLSI technology 22 microfabrication (for microelectronics only) 21 integrated circuit 20 semiconductor device 20 microlithography 16 more ... semiconductor 15 VLSI (very large scale integration) 12 electronic device 9 materials characterization 9 metallization 8 photoresist 8 silicon 8 lithography 7 semiconductor processing 7 chemical vapor deposition 6 optical microlithography 6 tungsten 6 electron beam lithography 4 electron microscopy 4 sensor (technical and physical) 4 MOS device 3 MOS transistor 3 X-ray lithography 3 epitaxy 3 microtechnology 3 quantum electronics 3 semiconductor epitaxy 3 solid state device 3 thin film technology 3 see all ... less ...

FGM - Microelectronic technology 101 FGME - Microlithography 33 FGML - Characterization of electronic materials 24 FGMH - Metallization, physics of microelectronics 20 TBF - Semiconductor devices 12 TBV - Electronic devices 10 more ... FHG - Electron microscopy 7 FJHE - Defects and radiation effects in semiconductors 7 FJLB - Physics of semiconductor devices 7 TBJ - Integrated circuits 6 FGK - Thin film technology, epitaxy 5 FMT - Refractory metals, refractory alloys 5 FJKC - III - V semiconductors 4 FFPE - Thin film electronic properties, semiconductor interfaces 3 TBD - Microelectronics 3 TBL - VLSI 3 FGJ - Laser and electron beam processing 2 FGKJ - Plasma processing, etching 2 FHAB - Surface and thin film characterization 2 FNK - Plastics - application, engineering aspects 2 TBA - Electronic engineering - general 2 DGAA - Computer architectures 1 FAF - Materials research - comprehensive works 1 FAQ - Materials research - institutions, research and development 1 FGCD - Crystal growth of specific substances 1 FGGB - Ion implantation, ion beam synthesis 1 FGGE - Ion beam surface modification 1 FGKF - Chemical vapor deposition 1 FGN - Nanotechnology 1 FHA - Materials characterization - general aspects 1 see all ... less ...

English 18 German 1