1
Photovoltaic manufacturing : etching, texturing, and cleaning /
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Field assisted sintering of yttria ceramics for plasma etching applications /
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Metallographisches, keramographisches, plastographisches Ätzen /
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Materialographische Präparationstechniken : Leitfaden für den Praktiker und Einsteiger ; Tipps & Tricks ; Vermeidung von Artefakten ; von der Probenentnahme bis zum fertigen Schliff - Materialographie ; Bauteilmaterialographie ; Dünnschlifftechnik ; Archäo-Materialographie /
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Manufacturing techniques for microfabrication and nanotechnology /
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Transparent conductive zinc oxide : basics and applications in thin film solar cells /
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Principles of plasma discharges and materials processing /
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Ceramography : preparation and analysis of ceramic microstructures /
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Nanotechnologie /
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Low temperature plasma physics : fundamental aspects and applications /
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11
Entwicklung einer niederenergetischen Flüssigmetall-Rasterionensonde für die in-situ Ionenätzung im Transmissionselektronenmikroskop (TEM) /
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Handbook of advanced plasma processing techniques /
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Plasma processes for semiconductor fabrications /
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Handbook of industrial diamonds and diamond films /
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15
Mikroelektronik. 2. Herstellungsprozesse für integrierte Schaltungen /
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Proceedings of the Eleventh International Symposium on Plasma Processing : [held in Los Angeles, CA, May 5-10, 1996 .... was held as part of the 189th meeting of the Electrochemial Society] /
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ULSI technology /
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Advances in catalysis. 41 /
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Vakuumbeschichtung Vol 0002: Verfahren und Anlagen.
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Kienel, G.
1995
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Ein anisotroper Plasmaätzprozess in Silizium für die Mikromechanik.
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