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1
Book
Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology /
Madou
,
Marc
J
.
2012
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,
Marc
J
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2
Book
From MEMS to Bio-MEMS and Bio-NEMS : manufacturing techniques and applications /
Madou
,
Marc
J
.
2012
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,
Marc
J
....
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3
Book
Manufacturing techniques for microfabrication and nanotechnology /
Madou
,
Marc
J
.
2012
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,
Marc
J
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4
Book
Fundamentals of microfabrication : the science of miniaturization /
Madou
,
Marc
J
.
2002
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,
Marc
J
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5
Book
Chemical sensing with solid state devices /
Madou
,
Marc
J
.
1989
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Madou
,
Marc
J
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Available as
Print Edition
Material Type
Book
5
Type of Literature
Handbook, Textbook
3
Year of Publication
From:
To:
Location
ZB
5
Name
Madou, Marc J.
5
Morrison, S. Roy.
1
Subject
nanotechnology
3
microfabrication (for microelectronics only)
2
chemical vapor deposition
1
construction
1
crystallography
1
design
1
more ...
etching
1
integrated circuit
1
lithography
1
machining
1
microelectromechanical systems (MEMS)
1
microelectronics
1
microtechnology
1
nanoelectronics
1
photonics
1
quantum mechanics
1
scaling theory
1
solid state physics
1
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Classification
FGN - Nanotechnology
3
FGT - Microtechnology
3
FGM - Microelectronic technology
1
TBJ - Integrated circuits
1
TBW - Sensors, actuators
1
Language
English
3
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