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FGN - Nanotechnology
Madou, Marc J.
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FGN - Nanotechnology
Madou, Marc J.
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From MEMS to Bio-MEMS and Bio-NEMS : manufacturing techniques and applications /
Madou, Marc J.
2012
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E-Book
Fundamentals of microfabrication and nanotechnology. Volume III : from MEMS to bio-MEMS and bio-NEMS : manufacturing techniques and applications [E-Book] /
Madou, Marc J.
2011
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Manufacturing techniques for microfabrication and nanotechnology /
Madou, Marc J.
2012
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Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology /
Madou, Marc J.
2012
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Available as
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3
Electronic Edition
1
Material Type
Book
4
Type of Literature
Handbook, Textbook
3
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ZB
4
Name
Madou, Marc J.
Subject
nanotechnology
4
microelectromechanical systems (MEMS)
2
nanoelectronics
2
scaling theory
2
chemical vapor deposition
1
crystallography
1
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1
lithography
1
microfabrication (for microelectronics only)
1
microtechnology
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photonics
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quantum mechanics
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solid state physics
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Classification
FGN - Nanotechnology
FGT - Microtechnology
4
Language
English
4
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