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From MEMS to Bio-MEMS and Bio-NEMS : manufacturing techniques and applications /
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Fundamentals of microfabrication and nanotechnology. Volume III : from MEMS to bio-MEMS and bio-NEMS : manufacturing techniques and applications [E-Book] /

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Manufacturing techniques for microfabrication and nanotechnology /
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Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology /
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