JuLib | Articles & more - {"Halbleiter-Nanoelektronik; IBN-1"}

1

Journal Article

Atomic layer deposition of HfO2 and Al2O3 layers on 300 mm Si wafers for gate stack technology

Lupták, R.
2011

Journal of vacuum science & technology / B, 29 (2011) S. 01A301

“...Halbleiter-Nanoelektronik; IBN-1 Halbleiter-Nanoelektronik...”

2

Contribution to a book
Contribution to a conference proceedings

High mobility strained SOI MOSFETs with LaScO3/TiN gate stacks fabricated with a replacement gate process

Durgun Özben, E.
2010

“...Halbleiter-Nanoelektronik; IBN-1 Halbleiter-Nanoelektronik...”

3

Conference Presentation

High mobility strained SOI MOSFETs with LaScO3/TiN gate stacks fabricated with a replacement gate process

Durgun Özben, E.
2010

“...Halbleiter-Nanoelektronik; IBN-1 Halbleiter-Nanoelektronik...”

4

Contribution to a book

Electrical characterization of TbScO3/TiN gate stacks in MOS capacitors and MOSFETs on strained and unstrained SOI

Durgun Özben, E.
2010

“...Halbleiter-Nanoelektronik; IBN-1 Halbleiter-Nanoelektronik...”

5

Journal Article

Amorphous ternary rare-earth gate oxides for future integration in MOSFETs

Lopes, J. M. J.
2009

Microelectronic engineering, 86 (2009)

“...Halbleiter-Nanoelektronik; IBN-1 Halbleiter-Nanoelektronik...”

6

Poster

Isotopic Labeling Investigation of Oxygen Annealed LaScO3 high-k films Grown on Si(100) by Molecular Beam Deposition

Lopes, J. M. J.
2009

“...Halbleiter-Nanoelektronik; IBN-1 Halbleiter-Nanoelektronik...”

7

Talk (non-conference)

Ternary rare-earth based gate dielectrics for future integration in MOSFETs

Schubert, J.
2009

“...Halbleiter-Nanoelektronik; IBN-1 Halbleiter-Nanoelektronik...”

8

Conference Presentation

Rare-earth based alternative gate dielectrics for future integration in MOSFETs

Lopes, J. M. J.
2009

“...Halbleiter-Nanoelektronik; IBN-1 Halbleiter-Nanoelektronik...”

9

Talk (non-conference)

Amorphous ternary rare-earth gate oxides for future integration in MOSFETs

Roeckerath, M.
2009

“...Halbleiter-Nanoelektronik; IBN-1 Halbleiter-Nanoelektronik...”

10

Contribution to a book
Contribution to a conference proceedings

Rare-earth based alternative gate dielectrics for future integration in MOSFETs

Lopes, J. M. J.
2009

“...Halbleiter-Nanoelektronik; IBN-1 Halbleiter-Nanoelektronik...”

11

Poster

Alternative ternary gate-dielectrics on germanium substrates

Schubert, J.
2009

“...Halbleiter-Nanoelektronik; IBN-1 Halbleiter-Nanoelektronik...”

12

Talk (non-conference)

Rare-earth Scandate High-k Films for Future Ge CMOS Technologies

Lopes, J. M. J.
2009

“...Halbleiter-Nanoelektronik; IBN-1 Halbleiter-Nanoelektronik...”

13

Journal Article

Formation of GaN nanodots on Si (111) by droplet nitridation

Debnath, R. K.
2009

Journal of crystal growth, 311 (2009) S. 3389 - 3394

“...Halbleiter-Nanoelektronik; IBN-1 Halbleiter-Nanoelektronik...”

14

Journal Article

Isotopic labeling study of oxygen diffusion in amorphous LaScO3 high-k films on Si(100) and its effects on the electrical characteristics

Lopes, J. M. J.
2009

Applied physics / A, 96 (2009) S. 447 - 451

“...Halbleiter-Nanoelektronik; IBN-1 Halbleiter-Nanoelektronik...”

15

Journal Article

Characterization of lanthanum lutetium oxide thin films grown by atomic layer deposition as an alternative gate dielectric

Roeckerath, M.
2008

Thin solid films, 517 (2008) S. 201 - 203

“...Halbleiter-Nanoelektronik; IBN-1 Halbleiter-Nanoelektronik...”

16

Journal Article

Effects of annealing on the electrical and interfacial properties of amorphous lanthanum scandate films prepared by molecular beam deposition

Lopes, J. M. J.
2007

Journal of applied physics, 101 (2007) S. 104109-1 - 104109

“...Halbleiter-Nanoelektronik; IBN-1 Halbleiter-Nanoelektronik...”
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17

Contribution to a book

Amorphous Lanthanum Lutetium Oxide Thin Films as an Alternative High-k Material : Physics and technology of high-k gate dielectrics 5

Lopes, J. M. J.
2007

“...Halbleiter-Nanoelektronik; IBN-1 Halbleiter-Nanoelektronik...”

18

Conference Presentation

Amorphous lanthanum lutetium oxide thin films as an alternative high-k material

Lopes, J. M. J.
2007

“...Halbleiter-Nanoelektronik; IBN-1 Halbleiter-Nanoelektronik...”

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